Research papers - J Am Soc Mass Spectrom 1998, 9, 6, 638
Quantitation of major elements with secondary ion mass spectrometry by using M2+-molecular ions
Johan Vlekken, Ting-Di Wu, Marc D’Olieslaeger, Gilbert Knuyt, Wilfried Vandervorst, and Luc De Schepper
Short description
A new quantitation method, based on the detection of M2+ molecular ions, is presented. It has been shown that M2+ molecular ions are formed by a recombination process between independently sputtered M and M+ particles. Based on this formation mechanism, it will be demonstrated that M2+ molecular ions can be used to quantitate major elements. The method will be used for quantitation of an AlxGa1−xAs multilayer. Furthermore, it will be shown that some matrix effects can be explained by the energy dependence of instrument transmission.
Details:
Category
Material Analyses
Industry
Semiconductor industry