Research papers - SIMS XI - Secondary Ion Mass Spectrometry 8/09/1997
Monte Carlo simulation of the formation of M2+ - molecular ions sputtered from metallic materials
Vlekken, J.; Wu, Ting-Di; D'Olieslaeger, Marc; Knuyt, G.; Vandervorst, Wilfried; De Schepper, Luc
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Category
Material Analyses
Industry
Semiconductor industry